OPTIwet SB 30 extended - Spin Wet
Product Information
The future technology in the semiconductor industry and production-
Spin Wet Process System within process:
OPTIwet SB 30 extended- Stand - Alone Spin Wet Process System for substrates up to 16“ (Ø 400 mm) and up to 12” x 12” (300 mm x 300 mm)
System consists of:- Spinner system with closed process chamber
- Process chamber made of polypropylene (PP) with safety door
- Including one programmable electronic media arm – Programmable in speed and position
- Including Back Side Rinse Nozzle for DI-Water
- Emergency Stop Button
- Input display unit with touch screen
- USB 2.0 port for data exchange
- Including software for PC / Notebook – For more comfortable recipe writing and storage
- Including an ENGLISH manual on standard paper and a CD-ROM
- Price without installation and training
- Requires at least one chuck
- Various application possibilities in one spinner system
Application possibilities:- Rinse and spin drying
- Development with photo resist
- Solvent applications (develop / strip)
- Megasonic – Cleaning
- High Pressure – Cleaning
- Brush – Cleaning
- Piranha – Cleaning
- Standard – Cleaning 1 (SC 1)
- Standard – Cleaning 2 (SC 2)
- HF Last
- Silicon, Silicondioxid (SiO2) and Silicon Nitride (Si3N4) – Etch applications
- Various metal etch applications
- “Lift – Off“
Technical data:- Voltage: UAC= 3 x 400 V / N / PE / 50 Hz / 16A
- Speed: 1 – 4.000 rpm – adjustable in 1 rpm steps (pending on substrate size and load)
- Acceleration ramp: 1 up to 3.000 rpm/s – adjustable in 1 rpm/s steps (pending on substrate size and load)
- Spinning time: 1 up to 999 s – adjustable in 0.1 s steps
- Substrate size: Up to Ø 16” or 12” x 12” (300 mm x 300 mm)
- Process chamber: Standard made of Polypropylene (PP)
- Process bowl exhaust:2 x outer diameter OD 110 mm, each 200m3/h
- Chamber exhaust: 2 x outer diameter OD 140 mm, each 300m3/h
- Compressed air: Clean Dry Air (CDA) 8 ± 2 bar
- Vacuum: -0.8 ± 0.2 bar
- Nitrogen (N2): 4.0 ± 0.5 bar
- Media drain connection to the house drain
- CE marked system