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OPTIspin ST23 - Spin Coating and Cleaning

OPTIspin ST23 - Spin Coating and Cleaning

  • Product Information

    The future technology in the semiconductor industry and production-
    Stand alone spinner module for coating; cleaning, developing, hotplate and HMDS within process

    OPTIspin ST 23

    • Stand - Alone Spinner System for Coating, Cleaning or Developing applications with hotplate and HMDS (HexaMethylDiSilazan - C6H19NSi2) hotplate for wafer up to Ø 8" (Ø 200 mm) and substrates up to 6" x 6" (150 mm x 150 mm) 

    System consists of:

    • Stand - Alone cabinet with all process modules integrated
    • Spinner system with process bowl cover (hardware interlock secured)
    • Multi piece process bowl (easily dismountable for cleaning purposes) with splash ring
    • Hotplate OPTIhot HB 20 with lifting pins for 2" up to 8"
    • Vapor prime HMDS (HexaMethylDiSilazan) hotplate OPTIhot VB 20
    • Input display unit with touch for spin coater and HMDS HP
    • Temperature controller and timer for hotplate
    • USB 2.0 port for data exchange
    • Including software for PC / Notebook - For more comfortable recipe writing and storage
    • Including an ENGLISH manual on standard paper and a CD-ROM
    • Price without installation and training
    • Requires at least one chuck (Not included !)

    Technical Data:

    • Voltage: UAC= 3 x 400 V / N / PE / 50 Hz (60 Hz) / 16A
    • Substrate size: Up to Ø 8" (Ø 200 mm) or 6" x 6" (150 mm x 150 mm)
    • Process exhaust: Outer diameter OD 110 mm, 200m3/h
    • Cabinet exhaust #1: Outer diameter OD 110 mm, 200m3/h
    • Cabinet / HP exhaust #2: Outer diameter OD 110 mm, 200m3/h
    • Process exhaust HMDS: Outer diameter OD 110 mm, 200m3/h
    • Cabinet exhaust HMDS: Outer diameter OD 110 mm, 200m3/h
    • Compressed air: Clean Dry Air (CDA) 8 ± 2 bar
    • Vacuum: -0.8 ± 0.2 bar
    • Nitrogen (N2): 4.0 ± 0.5 bar
    • CE marked system

    Chucks: Option

    Dispense: Option

    Nozzle: Options

    Hotplate: Option

This is a customizable product with a very large amount of options available. Please contact our sales department for more information and support to get a product customized to your needs.

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