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DOMINUS Coater ST22i - Spray Coating

DOMINUS Coater ST22i - Spray Coating

  • Product Information

    The future technology in the semiconductor industry and production-Spray Coating System and Hotplate within process:

    DOMINUS Coater - OPTIcoat ST22i

    • Stand - Alone Spray Coating System for Wafers up to Ø 8” (Ø 200 mm) and Substrates up to 6” x 6” (150 mm x 150 mm)

    System consists of:

    • Stand - Alone cabinet with all process modules integrated
    • Dominus spray coater process chamber with safety door
    • Hotplate OPTIhot HB 20+ with lifting pins for 2” up to 8”
    • Including one programmable media arm with micro nozzle
    • Programmable Nozzle (Needle adjustment)
    • Emergency Stop Button
    • Input display unit with touch screen
    • USB 2.0 port for data exchange
    • Including software for PC / Notebook – For more comfortable recipe writing and storage
    • Including an ENGLISH manual on standard paper and a CD-ROM
    • Price without installation and training
    • Requires at least one chuck (Not included !)
       

    Technical data:

    • Voltage: UAC= 3 x 400 V / N/PE/50 Hz /16A
    • Substrate size:Up to Ø 8” (Ø 200mm) or 6” x 6” (150mm x 150mm)
    • Chamber /HP exhaust #1+2: 2 x outer diameter OD 110 mm, each 200m3/h
    • Cabinet exhaust: Outer diameter OD 110 mm, 200m3/h
    • Controller exhaust: Outer diameter OD 110 mm, 200m3/h
    • Drain: 5 liter waste tank and high-level sensor inside the cabinet
    • Compressed air: Clean Dry Air (CDA) 8 ± 2 bar
    • Vacuum: -0.8 ± 0.2 bar
    • Nitrogen (N2) Optional: 4.5 ± 0.5 bar
    • CE marked system


    Hotplate:

    • Temperature range: Up to 250°C - Adjustable in 0.1°C steps
    • Hotplate time: 1 up to 999 s - Adjustable in 0.1 s steps
    • Proximity: Programmable in 0.1 mm steps
    • For Wafer: Up to Ø 8” (Ø 200 mm)
    • For Substrate:Up to 6” x 6” (150 mm x 150 mm)
    • Lifting pins: For Ø 4” up to Ø 12”
    • Compressed air: Clean Dry Air (CDA) 8 ± 2 bar
    • Vacuum: -0.8 ± 0.2 bar
    • Nitrogen (N2) Optional: 4.5 ± 0.5 bar

This is a customizable product with a very large amount of options available. Please contact our sales department for more information and support to get a product customized to your needs.

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