DOMINUS Coater ST22i - Spray Coating

The future technology in the semiconductor industry and production-Spray Coating System and Hotplate within process:

DOMINUS Coater - OPTIcoat ST22i

• Stand - Alone Spray Coating System for Wafers up to Ø 8” (Ø 200 mm) and Substrates up to 6” x 6” (150 mm x 150 mm)

System consists of:

• Stand - Alone cabinet with all process modules integrated
• Dominus spray coater process chamber with safety door
• Hotplate OPTIhot HB 20+ with lifting pins for 2” up to 8”
• Including one programmable media arm with micro nozzle
• Programmable Nozzle (Needle adjustment)
• Emergency Stop Button
• Input display unit with touch screen
• USB 2.0 port for data exchange
• Including software for PC / Notebook – For more comfortable recipe writing and storage
• Including an ENGLISH manual on standard paper and a CD-ROM
• Price without installation and training
• Requires at least one chuck (Not included !)
   

Technical data:

• Voltage: UAC= 3 x 400 V / N/PE/50 Hz /16A
• Substrate size:Up to Ø 8” (Ø 200mm) or 6” x 6” (150mm x 150mm)
• Chamber /HP exhaust #1+2: 2 x outer diameter OD 110 mm, each 200m3/h
• Cabinet exhaust: Outer diameter OD 110 mm, 200m3/h
• Controller exhaust: Outer diameter OD 110 mm, 200m3/h
• Drain: 5 liter waste tank and high-level sensor inside the cabinet
• Compressed air: Clean Dry Air (CDA) 8 ± 2 bar
• Vacuum: -0.8 ± 0.2 bar
• Nitrogen (N2) Optional: 4.5 ± 0.5 bar
• CE marked system

Hotplate:

• Temperature range: Up to 250°C - Adjustable in 0.1°C steps
• Hotplate time: 1 up to 999 s - Adjustable in 0.1 s steps
• Proximity: Programmable in 0.1 mm steps
• For Wafer: Up to Ø 8” (Ø 200 mm)
• For Substrate:Up to 6” x 6” (150 mm x 150 mm)
• Lifting pins: For Ø 4” up to Ø 12”
• Compressed air: Clean Dry Air (CDA) 8 ± 2 bar
• Vacuum: -0.8 ± 0.2 bar
• Nitrogen (N2) Optional: 4.5 ± 0.5 bar