DOMINUS Coater ST20i - Spray Coating
The future technology in the semiconductor industry and production-
Spray Coating System within process:DOMINUS Coater - OPTIcoat ST20i
- Stand - Alone Spray Coating System for Wafers up to Ø 8” (Ø 200 mm) and Substrates up to 6” x 6” (150 mm x 150 mm)
System consists of:
- Stand - Alone cabinet with all process modules integrated
- Dominus spray coater process chamber with safety door
- Including one programmable media arm with micro nozzle
- Emergency Stop Button
- Input display unit with touch screen
- USB 2.0 port for data exchange
- Including software for PC / Notebook
- For more comfortable recipe writing and storage
- Including an ENGLISH manual on standard paper and a CD-ROM
- Price without installation and training
- Requires at least one chuck (Not included !)
Technical data:
- Voltage: UAC= 3 x 400 V / N / PE / 50 Hz /16A
- Substrate size: Up to Ø 8” (Ø 200mm) or 6” x 6” (150mm x 150mm)
- Chamber exhaust #1+2: 2 x outer diameter OD 110 mm, each 200m3/h
- Cabinet exhaust:Outer diameter OD 110 mm, 200m3/h
- Controller exhaust: Outer diameter OD 110 mm, 200m3/h
- Drain: 5 liter waste tank and high-level sensor inside the cabinet
- Compressed air: Clean Dry Air (CDA) 8 ± 2 bar
- Vacuum: -0.8 ± 0.2 bar
- Nitrogen (N2) Optional: 4.5 ± 0.5 bar
- CE marked system