primus SB15 - Spinner module
Product Information
The future technology in the semiconductor industry and production-
Spinner module within process:
PRIMUS SB15- Bench mounted spin coating or drying system for wafers up to Ø 6" (Ø 150 mm) and substrates up to 5" x 5" (127 mm x 127 mm)
System consists of:
- Spinner module with process bowl cover
- Integrated holding device for tube OD 6 mm
- Input control unit with up to 20 programmable recipes, each with 4 programmable recipe steps
- Including an ENGLISH manual on standard paper and a CD-ROM
- Price without installation and training
- Requires at least one chuck (not included)
Technical Data:
- Voltage: UAC= 230 V / N / PE / 50 Hz (60 Hz) / 16A
- Speed: 1 up to 6.000 rpm - adjustable in 1 rpm steps
- Acceleration ramp: adjustable in 1 up to 10 steps
- Spinning time: 1 up to 999 s - Adjustable in 0.1 s steps
- Substrate size: up to Ø 6" (Ø 150 mm) or 5" x 5" (127 mm x 127 mm)
- Process bowl: made of Polypropylene (PP)
- Vacuum: -0.8 ± 0.2 bar
- CE marked system
- Connection for waste bottle - Outer diameter (Ø) 34 mm
Chucks: option