OPTIspin ST32 - Spin Coating
Product Information
The future technology in the semiconductor industry and production-
Stand Alone Spinner system for coating, cleaning and developing within process:OPTIspin ST 32
- Stand - Alone Spin Coating System for wafers up to Ø 12" (Ø 300 mm) and substrates up to 9" x 9" (225 mm x 225 mm), for traditional open bowl spinning
System consists of:
- Stand Alone cabinet with all process modules integrated
- Spinner system with process bowl cover (hardware interlock secured)
- Multi piece process bowl (easily dismountable for cleaning purposes) with splash ring
- Input display unit with touch for spin coater
- Temperature controller and timer for hotplate
- USB 2.0 port for data exchange
- Hotplate OPTIhot HB 30 with lifting pins for 4" up to 12"
- Including software for PC / Notebook - For more comfortable recipe writing and storage
- Including an ENGLISH manual on standard paper and a CD-ROM
- Price without installation and training
- Requires at least one chuck (Not included !)
Technical Data:
- Voltage: UAC= 230 V / N / PE / 50 Hz (60 Hz) / 16A
- Motor speed: 1 - 6,000 rpm - Adjustable in 1 rpm steps (depending on substrate size and load)
- Motor acceleration ramp: 1 up to 2,500 rpm/s - Adjustable in 1 rpm/s steps (depending on substrate size and load)
- Spinning time: 1 up to 999 s - Adjustable in 0.1 s steps
- Substrate size: Up to Ø 12" (Ø 300 mm) or 9" x 9" (225 mm x 225 mm)
- Process bowl: Standard made of Polypropylene (PP)
- Process exhaust: Outer diameter OD 110 mm, 200m3/h
- Cabinet exhaust #1: Outer diameter OD 110 mm, 200m3/h
- Cabinet / HP exhaust #2: Outer diameter OD 110 mm, 200m3/h
- Drain: 5 liter waste tank and high-level sensor, inside the cabinet
- Compressed air: Clean Dry Air (CDA) 8 ± 2 bar
- Vacuum: -0.8 ± 0.2 bar
- Nitrogen (N2): 4.0 ± 0.5 bar
- CE marked system
Hotplate:
- Temperature range: Up to 300°C - Adjustable in 1°C steps
- Hotplate time: 1 up to 999 s - Adjustable in 0.1 s steps
- For wafer: Up to Ø 12" (Ø 300 mm)
- For substrate: Up to 9" x 9" (225 mm x 225 mm)
- Lifting pins: From Ø 4" up to Ø 12"
Chuck: Option
Dispense: Option
Nozzle: Option
Hotplate: Option