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OPTIspin ST30 - Spin Coating

OPTIspin ST30 - Spin Coating

  • Product Information

    The future technology in the semiconductor industry and production-
    Stand Alone Spinner system for coating, cleaning and developing within process:

    OPTIspin ST 30

    • Stand - Alone Spin Coating System for wafer up to Ø 12" (Ø 300 mm) and substrates up to 9" x 9" (225 mm x 225 mm), for traditional open bowl spinning 

    System consists of:

    • Stand - Alone cabinet with all process modules integrated
    • Spinner system with process bowl cover (hardware interlock secured)
    • Multi piece process bowl (easily dismountable for cleaning purposes) with splash ring
    • Input display unit with touch
    • USB 2.0 port for data exchange
    • Including software for PC / Notebook - For more comfortable recipe writing and storage
    • Including an ENGLISH manual on standard paper and a CD-ROM
    • Price without installation and training
    • Requires at least one chuck (Not included !)

    Technical Data:

    • Voltage: UAC= 230 V / N / PE / 50 Hz (60 Hz) / 16A
    • Motor speed: 1 - 6,000 rpm - Adjustable in 1 rpm steps (depending on substrate size and load)
    • Motor acceleration ramp: 1 up to 2,500 rpm/s - Adjustable in 1 rpm/s steps (depending on substrate size and load)
    • Spinning time: 1 up to 999 s - Adjustable in 0.1 s steps
    • Substrate size: Up to Ø 12" (Ø 300 mm) or 9" x 9" (225 mm x 225 mm)
    • Process bowl: Standard made of Polypropylene (PP)
    • Process exhaust: Outer diameter OD 110 mm, 200m3/h
    • Cabinet exhaust #1: Outer diameter OD 110 mm, 200m3/h
    • Cabinet exhaust #2: Outer diameter OD 110 mm, 200m3/h
    • Drain: 5 liter waste tank and high-level sensor, inside the cabinet
    • Compressed air: Clean Dry Air (CDA) 8 ± 2 bar
    • Vacuum: -0.8 ± 0.2 bar
    • Nitrogen (N2): 4.0 ± 0.5 bar
    • CE marked system


    Chuck: Option

    Dispense: Option

    Nozzle: Option

Dies ist ein kundenspezifisches Produkt bei dem eine sehr hohe Anzahl an Optionen zur Verfügung steht. Bitte kontaktieren Sie unseren Vertrieb für weitere Informationen und Unterstützung um ein auf Ihre Bedürfnisse angepasstes Produkt zu erhalten.

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