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OPTIcoat ST75 - Spin Coating

OPTIcoat ST75 - Spin Coating

  • Product Information

    The future technology in the semiconductor industry and production-
    Coating System with a process optimized covered chuck technology:

    OPTIcoat ST 75

    • Stand - Alone Spin Coating System with "Covered Chuck"
      technology for Wafers up to Ø 750 mm and substrates
      up to 20" x 20" (508 mm x 508 mm) for covered chuck spinning 

    System consists of:

    • Stand - Alone cabinet with all process modules integrated
    • Spinner System with Covered Chuck technology and automatic substrate pin lift
    • Multi piece process bowl with splash ring 
    • Input display unit with touch 
    • Including software for PC / Notebook - For more comfortable 
    • recipe writing and storage
    • Including an ENGLISH manual on standard paper and a CD-ROM
    • Requires at least one chuck (Not included !)

    Technical data:

    • Voltage: UAC= 3 x 400 V / N / PE / 50 Hz (60 Hz) / 16A
    • Motor speed: 1 up to 2,000 rpm - Adjustable in 1 rpm steps (depends on substrate weight and size) 
    • Motor acceleration ramp: 1 up to 2.500 rpm/s - Adjustable in 1 rpm/s steps (depends on substrate / chuck weight and size)
    • Spinning time: 1 up to 999 s - Adjustable in 0.1 s steps
    • Substrate size: Up to Ø 750 mm or 20" x 20" (508 mm x 508 mm)
    • Process bowl: Standard made of Polypropylene (PP)
    • Process exhaust#1: Outer diameter OD 110 mm, 200m3/h
    • Process exhaust#2+#3: Outer diameter OD 110 mm, each 200m3/h
    • Cabinet exhaust#1: Outer diameter OD 140 mm, 300m3/h
    • Cabinet exhaust#2: Outer diameter OD 110 mm, 200m3/h
    • Drain: 5 liter waste tank and high-level sensor
    • Compressed air: Clean Dry Air (CDA) 8 ± 2 bar
    • Vacuum: -0.8 ± 0.2 bar
    • Nitrogen (N2) Optional: 4.0 ± 0.5 bar
    • CE marked system

Dies ist ein kundenspezifisches Produkt bei dem eine sehr hohe Anzahl an Optionen zur Verfügung steht. Bitte kontaktieren Sie unseren Vertrieb für weitere Informationen und Unterstützung um ein auf Ihre Bedürfnisse angepasstes Produkt zu erhalten.

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