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OPTIcoat ST60 - Spin Coating

OPTIcoat ST60 - Spin Coating

  • Product Information

    The future technology in the semi conductor industry and production-
    Coating System with a process optimized covered chuck technology:

    OPTIcoat ST 60

    • Stand - Alone Spin Coating System with "Covered Chuck"
      technology for Wafers up to Ø 22" (Ø 560 mm) and substrates
      up to 16" x 16" (400 mm x 400 mm) for covered chuck spinning 

    System consists of:

    • Stand - Alone cabinet with all process modules integrated
    • Spinner System with Covered Chuck technology and automatic substrate pin lift
    • Multi piece process bowl with splash ring
    • Input display unit with touch for each system
    • Including software for PC / Notebook - For more comfortable recipe writing and storage
    • Including an ENGLISH manual on standard paper and a CD-ROM
    • Price without installation and training
    • Requires at least one chuck (Not included !)

    Technical data:

    • Voltage: UAC= 3 x 400 V / N / PE /50 Hz (60 Hz) / 16A
    • Motor speed: 1 up to 2,500 rpm - Adjustable in 1 rpm steps (depends on substrate weight and size)
    • Motor acceleration ramp: 1 up to 500 rpm/s - Adjustable in 1 rpm/s steps (depends on substrate / chuck weight and size)
    • Spinning time: 1 up to 999 s - Adjustable in 0.1 s steps
    • Substrate size: Up to Ø 22" (Ø 560 mm) or 16" x 16" (400 mm x 400 mm)
    • Process bowl: Standard made of Polypropylene (PP)
    • Process exhaust#1: Outer diameter OD 110 mm, 200m3/h
    • Process exhaust#2+3: Outer diameter OD 110 mm, each 200m3/h
    • Cabinet exhaust: Outer diameter OD 110 mm, 200m3/h
    • Controller exhaust: Outer diameter OD 110 mm, 200m3/h
    • Drain: 5 liter waste tank and high-level sensor
    • Compressed air: Clean Dry Air (CDA) 8 ± 2 bar
    • Vacuum: -0.8 ± 0.2 bar
    • Nitrogen (N2) Optional: 4.0 ± 0.5 bar
    • CE marked system

Dies ist ein kundenspezifisches Produkt bei dem eine sehr hohe Anzahl an Optionen zur Verfügung steht. Bitte kontaktieren Sie unseren Vertrieb für weitere Informationen und Unterstützung um ein auf Ihre Bedürfnisse angepasstes Produkt zu erhalten.

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