OPTIcoat SB20 - Spin Coating
Product Information
The future technology in the semiconductor industry and production-
Coating Module with "Covered Chuck" within process:OPTIcoat SB 20
- Bench Mounted Spin Coating System with "Covered Chuck" technology for Wafers up to Ø 8" (Ø 200 mm) and substrates up to 6" x 6" (150 mm x 150 mm), for traditional open bowl or covered chuck spinning
System consists of:
- Spinner system with "Covered Chuck" technology and automatic substrate pin lift
- Multi piece process bowl (easily dismountable for cleaning purposes) with splash ring
- 19" Controller unit with USB 2.0 port
- Input display unit with touch
- Including software for PC / Notebook - For more comfortable recipe writing and storage
- Including an ENGLISH manual on standard paper and a CD-ROM
- Price without installation and training
- Requires at least one chuck (Not included !)
Technical data:
- Voltage: UAC= 230 V / N / PE / 50 Hz (60 Hz) / 16A
- Motor-Speed: 1 up to 10,000rpm in 1rpm steps
- Motor-Acceleration ramp: 1 up to 50,000 rpm/sec in steps 1rpm/sec
- Spinning time: 1 up to 999 s - Adjustable in 0.1 s steps
- Substrate size: Up to Ø 8" (Ø 200 mm) or 6" x 6" (150 mm x 150 mm)
- Process bowl: Standard made of Polypropylene (PP)
- Process exhaust: Outer diameter OD 110 mm, 200 m3/h
- Drain: 5 liter waste tank and high-level sensor
- Compressed air: Clean Dry Air (CDA) 8 ± 2 bar
- Vacuum: -0.8 ± 0.2 bar
- Nitrogen (N2), optional: 4.0 ± 0.5 bar
- CE marked system
Chuck: Option
Dispense: Option