Maximus 805 - Automatic Cluster
Product Information
The future technology in the semi conductor industry and production-
fully automatic and programmable cassette-to-cassette micro-cluster system:MAXIMUS 805 Micro System
- Automatic Spin Coating and Developing System, with hotplates
for wafers up to Ø 8" (Ø 200mm) or substrates up to 6" x 6"
(150mm x 150mm)
The System consists of:
- 1 Cabinet MAXIMUS 804
- made of stainless steel
- glass doors for process area
- stainless steel / glass doors for media / maintenance area - 1 ISEL 3-axis robot, class 1
- 1 End effector vacuum standard for Ø 125mm and Ø 150mm wafer
- 1 Flat touch screen monitor
- 1 Computer as controller and user interface
- 2 / 3 Cassette loading plates for wafer up to Ø 8" cassette as I/O
- 1 Touch-less video pre-alignment for wafers up to Ø 8"
- 1 Light beacon (red , yellow , green )
- 1 Remote control, for quick log file checking for service and maintenance purposes via modem, ISDN interface or USB stick
- 1 Software for easy programming of station recipes and flow recipes at the system or on a connected PC
- 1 CE marked system
- 1 An ENGLISH manual on standard paper and a CD-ROM
Technical Data:
- Voltage: UAC= 3 x 400 V / N / PE / 50 Hz (60Hz) / 32A
- Spinner Coater System: Motor speed: 1 up to 10,000 rpm in 1rpm steps (depending on substrate size and load)
- Motor acceleration ramp: 1 up to 50,000 rpm/sec in steps 1rpm/sec (depending on substrate size and load)
- Spinning time: 0.1 up to 999sec in 0.1sec steps
- Process bowl: Made of Polypropylene (PP)
- Standard drain: 5 liter waste tank with high-level sensor inside the cabinet
- Pressure: Clean Dry Air (CDA) 8 ± 2 bar
- Vacuum: -0.8 ± 0.2 bar
- Nitrogen N2 (optional): 4.0 ± 0.5 bar
- Exhaust connection coater module: 1 x OD110mm, 200 m3/h
- Exhaust connection developer module: 1 x OD110mm, 200 m3/h
- Exhaust connection hotplate stacker: 2 x OD110mm, each 200 m3/h
- Exhaust connection cabinet: 3 x OD140mm, each 300 m3/h
- Automatic Spin Coating and Developing System, with hotplates