top of page
Maximus 802 - Automatic Cluster

Maximus 802 - Automatic Cluster

  • Product Information

    The future technology in the semi conductor industry and production-
    fully automatic and programmable cassette-to-cassette micro-cluster system:

    MAXIMUS 802 Micro system

    • Automatic Spin Coating and Developing System, with Hotplates
      for wafers up to Ø 8" (Ø 200mm) or substrates up to 6" x 6"
      (150mm x 150mm)

    The System consists of:

    • 1 Cabinet MAXIMUS 802
    • 1 3-axis robot
    • 1 End effector vacuum standard for Ø 125mm and Ø 150mm wafer
    • 1 Flat touch screen monitor
    • 1 Computer as controller and user interface
    • 2 Cassette loading plates for wafer up to Ø 8"cassettes as I/O
    • 1 Touch less video pre-alignment for wafers up to Ø 8"
    • 1 Light beacon (red , yellow , green )
    • 1 Remote control, for quick log file checking for service and maintenance purposes via modem or ISDN interface
    • 1 Software for easy programming of station recipe and flow recipe
    • at the system or on a connected PC
    • 1 CE marked system
    • 1 ENGLISH manual on standard paper and a CD-ROM

    Technical Data:

    • Voltage: UAC= 3 x 400 V / N/PE/50 Hz/16A
    • Spinner System: Motor speed: 1 up to 10,000rpm in 1rpm steps (depending on substrate size and load)
    • Motor acceleration ramp: 1 up to 50,000 rpm/sec in steps 1rpm/sec (depending on substrate size and load)
    • Spinning time: 0.1 up to 999sec in 0.1sec steps 
    • Process bowl: Standard made of Polypropylene (PP)
    • Standard drain: 5 liter waste tank with high-level sensor inside the cabinet
    • Pressure: Clean Dry Air (CDA) 8 ± 2 bar
    • Vacuum: -0.8 ± 0.2 bar
    • Nitrogen N2 (optional): 4.0 ± 0.5 bar
    • Exhaust connection spinner module: OD110mm, 200m3/h
    • Exhaust connection hotplate stacker: OD110mm, 200m3/h
    • Exhaust connection cabinet: OD110mm, 200m3/h
    • Exhaust connection controller: OD110mm, 200m3/h

Dies ist ein kundenspezifisches Produkt bei dem eine sehr hohe Anzahl an Optionen zur Verfügung steht. Bitte kontaktieren Sie unseren Vertrieb für weitere Informationen und Unterstützung um ein auf Ihre Bedürfnisse angepasstes Produkt zu erhalten.

bottom of page