DOMINUS Coater ST30i - Spray Coating
Product Information
The future technology in the semiconductor industry and production-Spray Coating System within process:
DOMINUS Coater - OPTIcoat ST30i
- Stand - Alone Spray Coating System for Wafers up to Ø 12” (Ø 300 mm) and Substrates up to 9” x 9” (225 mm x 225 mm)
System consists of:- Stand - Alone cabinet with all process modules integrated
- Dominus spray coater process chamber with safety door
- Including one programmable media arm with micro nozzle
- Programmable Nozzle (needle adjustment)
- Emergency Stop Button
- Input display unit with touch screen
- USB 2.0 port for data exchange
- Including software for PC / Notebook – For more comfortable recipe writing and storage
- Including an ENGLISH manual on standard paper and a CD-ROM
- Price without installation and training
- Requires at least one chuck (Not included !)
Technical data:- Voltage: UAC= 3 x 400 V / N/PE/50 Hz /16A
- Substrate size: Up to Ø 12” (Ø 300 mm) or 9” x 9” (225 mm x 225 mm)
- Chamber /HP exhaust #1+2: 2 x outer diameter OD 110 mm, each 200m3/h
- Cabinet exhaust: Outer diameter OD 110 mm, 200m3/h
- Controller exhaust: Outer diameter OD 110 mm, 200m3/h
- Drain: 5 liter waste tank and high-level sensor inside the cabinet
- Compressed air: Clean Dry Air (CDA) 8 ± 2 bar
- Vacuum: -0.8 ± 0.2 bar
- Nitrogen (N2) Optional: 4.5 ± 0.5 bar
- CE marked system