DOMINUS Coater ST22i - Spray Coating
Product Information
The future technology in the semiconductor industry and production-Spray Coating System and Hotplate within process:
DOMINUS Coater - OPTIcoat ST22i
- Stand - Alone Spray Coating System for Wafers up to Ø 8” (Ø 200 mm) and Substrates up to 6” x 6” (150 mm x 150 mm)
System consists of:
- Stand - Alone cabinet with all process modules integrated
- Dominus spray coater process chamber with safety door
- Hotplate OPTIhot HB 20+ with lifting pins for 2” up to 8”
- Including one programmable media arm with micro nozzle
- Programmable Nozzle (Needle adjustment)
- Emergency Stop Button
- Input display unit with touch screen
- USB 2.0 port for data exchange
- Including software for PC / Notebook – For more comfortable recipe writing and storage
- Including an ENGLISH manual as download
- Price without installation and training
- Requires at least one chuck (Not included !)
Technical data:
- Voltage: UAC= 3 x 400 V / N/PE/50 Hz /16A
- Substrate size:Up to Ø 8” (Ø 200mm) or 6” x 6” (150mm x 150mm)
- Chamber /HP exhaust #1+2: 2 x outer diameter OD 110 mm, each 200m3/h
- Cabinet exhaust: Outer diameter OD 110 mm, 200m3/h
- Controller exhaust: Outer diameter OD 110 mm, 200m3/h
- Drain: 5 liter waste tank and high-level sensor inside the cabinet
- Compressed air: Clean Dry Air (CDA) 8 ± 2 bar
- Vacuum: -0.8 ± 0.2 bar
- Nitrogen (N2) Optional: 4.5 ± 0.5 bar
- CE marked system
Hotplate:
- Temperature range: Up to 250°C - Adjustable in 0.1°C steps
- Hotplate time: 1 up to 999 s - Adjustable in 0.1 s steps
- Proximity: Programmable in 0.1 mm steps
- For Wafer: Up to Ø 8” (Ø 200 mm)
- For Substrate:Up to 6” x 6” (150 mm x 150 mm)
- Lifting pins: For Ø 4” up to Ø 12”
- Compressed air: Clean Dry Air (CDA) 8 ± 2 bar
- Vacuum: -0.8 ± 0.2 bar
- Nitrogen (N2) Optional: 4.5 ± 0.5 bar