DOMINUS Coater ST20i - Spray Coating

The future technology in the semiconductor industry and production-
Spray Coating System within process:
DOMINUS Coater - OPTIcoat ST20i
Stand - Alone Spray Coating System for Wafers up to Ø 8” (Ø 200 mm) and Substrates up to 6” x 6” (150 mm x 150 mm)

System consists of:
Stand - Alone cabinet with all process modules integrated
Dominus spray coater process chamber with safety door
Including one programmable media arm with micro nozzle
Emergency Stop Button
Input display unit with touch screen
USB 2.0 port for data exchange
Including software for PC / Notebook 
For more comfortable recipe writing and storage
Including an ENGLISH manual on standard paper and a CD-ROM
Price without installation and training
Requires at least one chuck (Not included !)
 
Technical data:
Voltage: UAC= 3 x 400 V / N / PE / 50 Hz /16A
Substrate size: Up to Ø 8” (Ø 200mm) or 6” x 6” (150mm x 150mm)
Chamber exhaust #1+2: 2 x outer diameter OD 110 mm, each 200m3/h
Cabinet exhaust:Outer diameter OD 110 mm, 200m3/h
Controller exhaust: Outer diameter OD 110 mm, 200m3/h
Drain: 5 liter waste tank and high-level sensor inside the cabinet
Compressed air:  Clean Dry Air (CDA) 8 ± 2 bar
Vacuum: -0.8 ± 0.2 bar
Nitrogen (N2) Optional: 4.5 ± 0.5 bar
CE marked system