top of page
DOMINUS Coater ST20i - Spray Coating

DOMINUS Coater ST20i - Spray Coating

The future technology in the semiconductor industry and production-
Spray Coating System within process:

DOMINUS Coater - OPTIcoat ST20i

  • Stand - Alone Spray Coating System for Wafers up to Ø 8” (Ø 200 mm) and Substrates up to 6” x 6” (150 mm x 150 mm)


System consists of:

  • Stand - Alone cabinet with all process modules integrated
  • Dominus spray coater process chamber with safety door
  • Including one programmable media arm with micro nozzle
  • Emergency Stop Button
  • Input display unit with touch screen
  • USB 2.0 port for data exchange
  • Including software for PC / Notebook 
  • For more comfortable recipe writing and storage
  • Including an ENGLISH manual on standard paper and a CD-ROM
  • Price without installation and training
  • Requires at least one chuck (Not included !)

 
Technical data:

  • Voltage: UAC= 3 x 400 V / N / PE / 50 Hz /16A
  • Substrate size: Up to Ø 8” (Ø 200mm) or 6” x 6” (150mm x 150mm)
  • Chamber exhaust #1+2: 2 x outer diameter OD 110 mm, each 200m3/h
  • Cabinet exhaust:Outer diameter OD 110 mm, 200m3/h
  • Controller exhaust: Outer diameter OD 110 mm, 200m3/h
  • Drain: 5 liter waste tank and high-level sensor inside the cabinet
  • Compressed air:  Clean Dry Air (CDA) 8 ± 2 bar
  • Vacuum: -0.8 ± 0.2 bar
  • Nitrogen (N2) Optional: 4.5 ± 0.5 bar
  • CE marked system

Dies ist ein kundenspezifisches Produkt bei dem eine sehr hohe Anzahl an Optionen zur Verfügung steht. Bitte kontaktieren Sie unseren Vertrieb für weitere Informationen und Unterstützung um ein auf Ihre Bedürfnisse angepasstes Produkt zu erhalten.

bottom of page